Design and Simulation of Microelectromechanical Systems (MEMS)
- Design of MEMS actuators and sensors in the commercial simulation software Coventor MEMS+
- Investigation of sensors and actuators by means of simulation
- Basic knowledge in modeling of micromechanical devices and systems (MEMS)
Lab Course on Component Characterization in Micro- and Power Electronics
The practical course deals with the characterization of selected, typical semiconductor components of power electronics, microelectronics and sensor technology. Among others, the following devices are characterized:
- Power MOSFET
- IGBT
- pin diodes
- Mass flow sensors
- Solar cells