Measurement Setups
Measurement setup for MEMS characterization (based on White Light Interferometry)
- White Light Interferometer
- Type: Veeco WYKO NT 1100 DMEMS
- Statical and dynamical topography measurements
- Controlled pressure chamber
- Impedance analyzer
- Electrical actuation with high-voltage signal generator
Measurement setup for MEMS characterization (based on Laser Doppler Vibrometry)
- Laser Doppler Vibromenter
- Type: Polytec MSA-500
- Dynamical measurements
- Controlled pressure chamber
- Electrical actiation with high-voltage signal generator
- Mechanical acutation with piezo shaker
High temperature measurement setup
- Characterization of semiconductor devices at high temperatures in vacuum